Facilities

FABRICATION EQUIPMENT

CLEAN ROOM

Our group has a small Class 100 clean room equipped with a laminar flow hood and a spinner in which wet processing is performed, as well as a larger Class 10000 clean room where deposition equipment is kept. A separate room houses the scanning electron microscope used for electron-beam lithography.

TESCAN FIELD EMISSION SCANNING ELECTRON MICROSCOPE

Tescan MIRA LMH FESEM. This machine has a maximum acceleration voltage of 30 keV, and a minimum imaging resolution of the order of 2 nm, but it is also good at imaging devices at low acceleration voltages. The MIRA has been interfaced to the ElectronScribe pattern generation program and is primarily used for electron beam lithography.

CVD FURNACE FOR NANOTUBE GROWTH

This small Lindbergh furnace is equipped with 4 flow controllers, and is used to grow carbon nanotubes and graphene.

 

HOMEBUILT E-GUN EVAPORATOR

This e-gun evaporator is equipped with a glass bell jar and a 6-inch Varian diffusion pump. It has a 5-pocket, 3 kV linear Telemark e-gun and an in-situ plasma etcher. Base pressure is of order 1 x 10-7 Torr.

 

EDWARDS THERMAL EVAPORATOR

A smaller manual two-source thermal Edwards 306 coater is primarily used for depositing only clean metals such as high-purity gold, copper and aluminum.

DENTON E-GUN EVAPORATOR

A Denton 6 keV, 4-pocket e-gun evaporator is primarily used for evaporation of ferromagnetic materials and “dirty” metals for contacts.

 

ARGON ION MILL

Custom-made Ar ion milling for directional etching of samples and devices

 

ETCHERS

We have a variety of home-made external and in situ etchers for surface cleaning of samples

In addition to the fabrication equipment in our group, we have access to the central fabrication facilities at Northwestern, including a state-of-the-art cleanroom (NUFAB) and microscopy and characterization facilities (NUANCE).

 

MEASUREMENT AND CHARACTERIZATION EQUIPMENT

OXFORD KELVINOX 300 DILUTION
REFRIGERATOR

Our Kelvinox 300 dilution refrigerator is equipped with a 12/14T superconducting solenoid, and is capable of going down to 15 mK.

OXFORD KELVINOX MX100 DILUTION REFRIGERATOR

A newer Kelvinox MX100 dilution refrigerator is equipped with a two-axis 3T/1T superconducting solenoid, and is capable of going down to 15 mK.

JANIS 3HE REFRIGERATOR

Our Janis sorption pumped 3He refrigerator can be inserted into a dewar with a two-axis 3T/1T superconducting solenoid.

 

PARK XE-150 MULTIMODE SCANNING PROBE MICROSCOPE

This is a room temperature microscope capable of AFM, MFM, EFM, and other microscopy modes.

In addition to these, we have number of smaller cryogenic inserts, as well as microwave equipment described at http://highfrequency.northwestern.edu.

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